Emebere ya maka usoro ablation laser, mkpuchi nke Yuanan na-eme ka ọ dị mma n'ụzọ ziri ezi na mkpụrụ akụkụ semiconductor ma na-ebelata mmebi ọkụ. Usoro nke nwere mmetụta foto na-eme ka iwepụ ihe dị ọcha, na-ekwu okwu delamination na carbonization na nkwakọ ngwaahịa dị elu na mmepụta MEMS.