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O wa nibi: Ile / Awọn ọja / Kemikali fun Semiconductors / Isenkanjade fun konge Awọn ẹya ara Ati Semikondokito / Ìwọnba Acid Hardened Photoresist Stripper

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Ìwọnba Acid Àiya Photoresist Stripper

O jẹ olutọpa acid ìwọnba ore-ọfẹ ti a ṣe agbekalẹ ni pataki lati yọkuro awọn iyoku photoresist lile/carbonized lakoko ti o daabobo awọn sobusitireti ifura bii Si, GaAs, ati awọn asopọ irin.
 
Awọn anfani:
  • Yiyọkuro-pupọ
  • Irin-ailewu acid ìwọnba
  • Halogen/VOC-ọfẹ
  • Iduroṣinṣin 25-90 ° C
  • 1-igbese carbonized koju yiyọ kuro‌
  • Lilo sobusitireti pupọ (SiC/MEMS/ rọ)
 
Awọn ẹya iṣakojọpọ: 25L/agba, 200L/agba
Wiwa:
Opoiye:
Beere Fi si Agbọn

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  • 8299

8299 Ìwọnba Acid Hardened Photoresist Stripper jẹ acid ìwọnba ati ojuutu yiyọ photoresist ore-ọfẹ, ati pe o jẹ apẹrẹ pataki lati koju awọn ọran ti o ku ti photoresist odi lẹhin ẽru , imularada , tabi paapaa carbonization . Ilana alailẹgbẹ rẹ, apapọ awọn acids Organic, awọn inhibitors ipata ti o ga julọ, ati awọn olomi ailagbara kekere, ṣe idaniloju yiyọkuro photoresist daradara labẹ awọn ipo kekere lakoko aabo aabo awọn oriṣiriṣi awọn ohun elo ati awọn sobusitireti.

a) Broad-Spectrum photoresist Yiyọ Agbara

  • Wulo fun Mejeeji Rere ati Negetifu Photoresists‌: Ṣe afihan imọ-jinlẹ pataki ni mimu awọn iṣẹku agidi lẹhin eeru, imularada, ati carbonization.

b) Agbekalẹ Acid ìwọnba

  • Iye pH: Awọn sakani laarin 3-5, yago fun ipata si awọn ipele irin bii Al, Cu, Ti, ati awọn alamọdaju agbo bi GaAs.

c) Ore ayika ati Ailewu

  • Halogen-ọfẹ ati Fluorine-ọfẹ: Ni ibamu pẹlu awọn ilana ayika bii RoHS ati REACH.

  • Irẹwẹsi kekere ati kekere VOC‌: Kii majele ati ti kii ṣe ina, idinku awọn eewu ibi iṣẹ ati aabo ilera oniṣẹ ẹrọ.

d) Ilana ṣiṣe

  • Ohun elo iwọn otutu jakejado (25 ° C – 90 ° C): iduroṣinṣin iwọn otutu fun MEMS / iṣakojọpọ ti ilọsiwaju, sooro iwọn otutu fun EUV.

  • Ilaluja daradara‌: Ṣe afihan solubility ti o dara julọ fun awọn oluyaworan ti o ni asopọ giga (fun apẹẹrẹ, SU-8) ati awọn photoresists odi carbonized.

  • Ilana Irọrun ‌: Ọja ẹyọkan ti o lagbara ibaramu photoresist meji, idinku akoko iyipada laini iṣelọpọ, yago fun idoti agbelebu, ati gigun igbesi aye ohun elo.


Ẹya ara ẹrọ
Ibile Stripper  
 8299
Ohun elo Abo
Le ba awọn irin (Cu/Al) jẹ Ailewu fun gbogbo awọn ohun elo bọtini
Photoresist Rang Ni opin si iru 1 (+/-) Kapa gbogbo awọn orisi + carbonized
Eco-Friendly Nigbagbogbo VOC / halogen giga Halogen-ọfẹ, kekere VOC
Iye owo ilana Awọn ọja lọpọlọpọ nilo Ọkan ojutu fun gbogbo
Ibamu Ohun elo Le degrade awọn tanki Ti kii-ibajẹ
Awọn iwọn otutu ti nṣiṣẹ 40-80°C 25–90°C


Awọn abuda Ẹyọ Data
Iye pH
 - 3-5
Specific Walẹ -

0.95-1
Ojuami farabale °C 190

a) Awọn eerun ti o da lori Silikoni

Ni ibamu pẹlu Si/SiO₂/SiN, idabobo Cu/Al awọn fẹlẹfẹlẹ interconnection.

b) Awọn ẹrọ GaAs/GaN

Fọọmu acid ìwọnba ṣe idilọwọ ipata ti awọn amọna Au/Ti.

c) Awọn semikondokito agbara

Ni imunadoko yoo yọkuro SiC iwọn otutu giga carbonized photoresist, aabo awọn fẹlẹfẹlẹ Al.

d) Iṣakojọpọ To ti ni ilọsiwaju

Nigbakannaa nu aloku TSV ati awọn fẹlẹfẹlẹ pasifif PI.

e) Awọn sensọ MEMS

Yọ iyọkuro ohun alumọni etch jinna laisi ibajẹ awọn paadi Au.

f) Awọn ẹrọ itanna to rọ

Ni ibamu pẹlu awọn sobusitireti PI/PET laisi baje awọn okun waya nano-fadaka.

a) Awọn ọna Cleaning ti o wulo

  • Iṣeduro: Gbigbo gbona

  • Awọn ọna miiran pẹlu ultrasonic, spraying, ati brushing.

b) Iwọn otutu ati Aago

  • Iwọn otutu: 25°C – 90°C (igbona nmu isọdọtun).

  • Isọdi Iwọnwọn: Awọn iṣẹju 3 – 15 fun ojò kan (lilo ojutu afinju).

  • Iyoku Alagidi: Le ṣe afikun si iṣẹju 30.

c) Awọn ilana Isẹ bọtini

  • Lo Solusan Afinju: Ko si fomipo ti o nilo.

  • Ṣetọju Iwọn otutu Ṣeto: Lẹhin immersing wafers ni ojutu yiyọ kuro.

  • Ṣatunṣe Aago Da lori Photoresist Sisanra/Agba Iwa Carbonization‌.

Ti tẹlẹ: 
Itele: 
Post-EUV Photoresist Stripper fun Awọn iṣẹku Carbonized Ti kii-ibajẹ PR Stripper fun IC Low-aloku Eco-ore Photoresist Stripper Solusan Photoresist Stripper fun 2.5D / 3D IC TSV Olufẹ-jade WLP Stripper ibaramu GaAs Photoresist Remover Solution Low-k Dielectric Stripper fun Negetifu Photoresist Ga-otutu Post-Bake Stripper Iwọn otutu-kekere Photoresist Stripper fun Awọn iṣẹku Carbonized

Jẹmọ Products

2832 Photoresist Cleaning Agent
Aini-ibajẹ Alkaline Photoresist Stripper fun Semikondokito

Awọn iroyin ti o jọmọ

akoonu ti ṣofo!

Shenzhen Yuanan Technology Co., Ltd.
WhatsApp:
+ 86- 18123969340 
+ 86- 13691824013
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