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8299
8299 Mild Acid Hardened Photoresist Stripper bụ obere acid na eco-eco-friendly photoresist striping solution, ma emebere ya nke ọma iji lebara okwu ndị fọdụrụ nke photoresist na-adịghị mma mgbe ịhịa aka , n'ahụ , ma ọ bụ ọbụna carbonization . Nhazi ya pụrụ iche, ijikọta acid organic, ndị na-egbochi corrosion na-arụ ọrụ nke ọma, na ihe mgbaze dị ala, na-eme ka mwepụ nke photoresist dị mma n'okpuru ọnọdụ dị nro ma na-echekwa ụdị ihe dị iche iche na ihe ndị dị nro n'enweghị nsogbu.
a) Broad-Spectrum photoresist ike iwepụ
Ọdabara ma nke ọma na nke na-adịghị mma Photoresists: Na-egosipụta ọkachamara pụrụ iche n'ijikwa ihe ndị isi ike mgbe ntụchara, ọgwụgwọ na carbonization.
b) Ụdị Acid dị nro
Uru pH: Oke dị n'etiti 3-5, na-ezere corrosion na n'ígwé ígwè dị ka Al, Cu, Ti, na semiconductors dị ka GaAs.
c) Enyi na gburugburu ebe obibi na nchekwa
Halogen-Free na Fluorine-Free: na-agbaso ụkpụrụ gburugburu ebe obibi dị ka RoHS na REACH.
Volatility dị ala na VOC dị ala: anaghị egbu egbu na enweghị ọkụ, na-ebelata ihe egwu ebe ọrụ yana ichebe ahụike onye ọrụ.
d) Usoro arụmọrụ
Ngwa ngwa okpomọkụ (25°C–90°C): Nkwụsi ike dị ala maka MEMS/nkwakọ ngwaahịa dị elu, na-eguzogide okpomọkụ maka EUV.
Ntinye oma nke oma: Na-egosiputa ezigbo solubility maka fotoresists nwere njikọ chiri anya (dịka ọmụmaatụ, SU-8) yana photoresists na-adịghị mma nke carbonized.
Usoro dị mfe: Otu ngwaahịa nwere ike ịmekọrịta fotoresist okpukpu abụọ, na-ebelata oge mgbanwe akara mmepụta, na-ezere mmetọ obe, na ịgbatị oge ndụ akụrụngwa.
| Njirimara |
Traditional Stripper |
8299 |
| Nchekwa ihe |
Nwere ike imebi ọla (Cu/Al) | Nchekwa maka isi ihe niile |
| Onye na-ese foto Rang | Oke na ụdị 1 (+/-) | Na-ejikwa ụdị niile + carbonized |
| Eco-Enyi na Enyi | Ọtụtụ mgbe elu VOC / halogen | Halogen efu, VOC dị ala |
| Ọnụ ego usoro | Ọtụtụ ngwaahịa achọrọ | Otu ngwọta maka mmadụ niile |
| Ngwa ndakọrịta | Nwere ike mebie tankị | Na-adịghị emebi emebi |
| Okpomọkụ na-arụ ọrụ | 40-80 Celsius C | 25-90 Celsius C |
| Njirimara | Nkeji | Data |
| Uru pH |
- | 3-5 |
| Nnukwu ike ndọda | - | 0.95-1 |
| Ebe esi nri | Celsius C | 190 |
a) Chips dabeere na silicon
Dakọtara na Si/SiO₂/SiN, na-echebe akwa njikọ njikọ Cu/Al.
b) Ngwa GaAs/GaN
Usoro acid dị nro na-egbochi mmebi nke electrodes Au/Ti.
c) Semiconductors ike
Na-ewepụ SiC okpomọkụ carbonized photoresist nke ọma, na-echebe akwa akwa.
d) Nkwakọ ngwaahịa dị elu
N'otu oge na-asachapụ ihe fọdụrụ TSV na PI passivation layers.
e) Ihe mmetụta MEMS
Na-ewepụ ihe fọdụrụ na silicon etch na-enweghị corroding Au pads.
f) Eletrọnịkị na-agbanwe agbanwe
Dakọtara na mkpụrụ PI/PET na-emebighị waya nano-silver.
a) Ụzọ nhicha dị mkpa
Akwadoro: itinye ọkụ
Ụzọ ndị ọzọ gụnyere ultrasonic, spraying, na brushing.
b) Okpomọkụ na oge
Okpomọkụ nso: 25°C – 90°C (ọkụ na-eme ngwa ngwa ihicha).
Ọkọlọtọ ihicha: 3 - 15 nkeji kwa tank (iji ngwọta dị mma).
Ihe fọdụrụ isi ike: Enwere ike ịgbatị ihe ruru nkeji iri atọ.
c) Ntuziaka ọrụ igodo
Jiri Ngwọta Na-adịghị mma: Ọ dịghị mmiri ọ bụla achọrọ.
Jikwaa Okpomọkụ Tọọ: Mgbe imikpusịrị wafers n'ime ihe ngwọta.
Dezie oge dabere na ogo nke ịdị arọ/carbonization photoresist.
ọdịnaya efu!